NanoPhotonics AG

ELLIPSON

[Optional] *optical * measuring apparatus, in particular measuring apparatus to test the film thickness of electronic components such as silicon wafers;In the statement, Column 1, line 5, optional should be deleted, and, optical should be inserted.;

JANUS

Optical measuring devices, in particular measuring devices for examining electronic components, such as semiconductor wafers, optical defect inspection devices for the detection of particles, micro-surface roughness and surface defects, optical layer thickness measuring devices for the layer thickness measurement of transparent layers, such as laser ellipsometers; combined optical measuring devices, in particular combined defect inspection devices and layer thickness measuring devices;