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Brands and Their Owners
Welcome to the Brand page for “LUMENA”, which is offered here for Optical metrology product that provides an accurate measurement of the numerical aperture of a lithography tool and variation of same across the stepper or scanner exposure field, by utilizing an instrument that fits in a standard reticle/pellicle envelope, and a software package that processes the wafer images;.
Its status is currently believed to be active. Its class is unavailable. “LUMENA” is believed to be currently owned by “LITEL INSTRUMENTS”.
| Owner: |
LITEL INSTRUMENTS
Owner Details |
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| Description: |
Optical metrology product that provides an accurate measurement of the Numerical Aperture of a lithography tool and variation of same across the stepper or scanner exposure field, by utilizing an instrument that fits in a standard reticle/pellicle envelope, and a software package that processes the wafer images;
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| Categories: | OPTICAL METROLOGY PRODUCT THAT PROVIDES |