SUBSTRATE INSPECTION SYSTEM

Brand Owner (click to sort) Address Description
GALAXY AFS-300 ADE Corporation 80 Wilson Way Westwood MA 020901806 Substrate inspection system, comprising hardware and associated software for measurement of substrates, namely, semiconductor wafers, to determine wafer flatness, shape, thickness, Bow Wrap and SORI, resistivity, conductivity and notch detection;
GALAXY AWIS - 300 ADE Corporation 80 Wilson Way Westwood MA 020901806 Substrate inspection system, comprising non contact optical scanning equipment and associated software for inspecting semiconductor wafers and for detecting and classifying surface defects on wafers, namely, particles and scratches, polishing defects, crystal orientation defects, roughness, edge chips and cracks;
 

Where the owner name is not linked, that owner no longer owns the brand

   
Technical Examples
  1. An inspection system, and process for use thereof, for inspecting semiconductors or like substrates. The inspection system includes an inspection device and an auxiliary sensor apart from the inspection device. The auxiliary sensor is used to collect height data and generate a map of a semiconductor or like substrate to aids in focusing the inspection device.