LayTec Aktiengesellschaft

EPICURVE

Optical sensors for monitoring and controlling the layer growth during the manufacture of optoelectronic components, namely, light emitting diodes, laser diodes, photo diodes, transistors, integrated circuits, solar cells and semiconductors; devices and plants for measuring physical parameters during the manufacture of optoelectronic components, namely, optical sensors for measuring substrate bowing, growth rate, surface morphology, optical constants, temperature, reflectance, rotation speed and film composition; computer software for measuring, monitoring and controlling the manufacture of optoelectronic components;

EPIGUARD

[Optical sensors; electronic devices and plants assembled thereof for measuring physical parameters and for measuring, monitoring and controlling the layer growth during the manufacture of semiconductor devices; ]Software for measuring physical parameters and for measuring, monitoring and controlling the layer growth during the manufacture of semiconductor devices;EPI GUARD;

EPINET

Software to analyze and interpret in-situ and in-line measurement parameters before, during and after thin layer deposition; software to control process deviations during thin layer deposition; software to improve yield and stability of production processes by correlating multi-measurement parameters and their analysis results for the statistical process control;

LAYTEC

Optical sensors; electronic devices and plants assembled thereof for measuring physical parameters; electronic devices and plants assembled thereof for measuring, monitoring and controlling the layer growth during the manufacture of semiconductor devices; software for recording and analyzing data from optical sensors, electronic devices and plants assembled thereof, during the semiconductor manufacturing process;LAY TECH;

SOLR

Optical measuring instruments for measuring, monitoring and controlling the covering processes, in particular during thin layer photovoltaic processes for manufacturing solar cells, which are based on copper, indium, gallium and sulphur, amorphous silicon, cadmium telluride, cadmium sulphide, organic or inorganic and other materials, namely measuring instruments based on specular spectral reflectometry with material aligned optical spectral range and with a single or multiple measuring heads integrated in the covering process (in-line application); apparatus for measuring, monitoring and controlling the layer thickness and refraction indices, the absorption coefficient, roughness, texture, conductivity, texture parameters and related optical parameters of the layers during the manufacturing of thin layer solar cells, namely optical spectral reflectometers for measuring, monitoring and controlling the physical parameters during manufacturing of thin layer solar cells;