X RAY METROLOGY INSTRUMENTS ANALYSIS

Brand	Owner	Address	Description
MUL-T-PASS	BRUKER TECHNOLOGIES LTD.	P.O. Box 103 Migdal HaEmek 2306990 Israel	X-ray metrology instruments for analysis and characterization of thin films, and accessories, namely, computer work stations in the nature of computer hardware, and software for controlling the operation and processing data of such instruments;MULTI- PASS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method of generating a metrology recipe includes identifying regions of interest within a device layout. A coordinate list, which corresponds to the identified regions of interest, can be provided and used to create a clipped layout, which can be represented by a clipped layout data file. The clipped layout data file and corresponding coordinate list can be provided and converted into a metrology recipe for guiding one or more metrology instruments in testing a processed wafer and/or reticle. The experimental metrology results received in response to the metrology request can be linked to corresponding design data and simulation data and stored in a queriable database system.