WET CLEANING COMPOUND USED

Brand	Owner	Address	Description
LEATHER WASH	Lucenta, Thomas R.	P.O. Box 35949 Tulsa OK 74153	wet cleaning compound used to clean leather products;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Cleaning solutions for photoresist are disclosed which are useful for cleaning a semiconductor substrate in the last step of development when photoresist patterns are formed. Also, methods for forming photoresist patterns using the same are disclosed. The disclosed cleaning solution comprises H2O as a solution, a surfactant which is phosphate-alcoholamine salt represented by Formula 1, and an alcohol compound. The disclosed cleaning solution has lower surface tension than that of distilled water which has been used for conventional cleaning solutions, thereby improving resistance to photoresist pattern collapse and stabilizing the photoresist pattern formation.