VACUUM SENSORS

Brand Owner (click to sort) Address Description
CORVAC Yamatake Corporation Chiyoda-ku 19F Tokyo Building 2-7-3 Marunouchi Tokyo 100-6419 Japan Vacuum Sensors;
SAVAC Yamatake Corporation Chiyoda-ku 19F Tokyo Building 2-7-3 Marunouchi Tokyo 100-6419 Japan Vacuum Sensors;
TITAN BALZERS AKTIENGESELLSCHAFT FL-9496 Balzers Liechtenstein Vacuum Sensors;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. The vacuum suction holding apparatus of the present invention has a vacuum duct which is disposed inside a polishing head, with one end of this vacuum duct being opened in the attachment surface and the other end thereof being connected to a vacuum source. A polishing body is held by suction on the attachment surface of the polishing head by sucking air through the vacuum duct. The apparatus further has an orifice which is disposed in the vacuum duct, a first pressure sensor and a second pressure sensor which detect the pressure inside the vacuum duct at positions before and after the orifice, and a judgment device which judges whether or not the polishing body is held by suction on the polishing head on the basis of the pressure difference before and after the orifice detected by these two pressure sensors.