TWO DIMENSIONAL GRATING PLANAR METROLOGY

Brand Owner Address Description
NANOGRID OPTRA, INC. 461 Boston Street Topsfield MA 01983 two-dimensional grating and planar metrology systems for use in measuring dual-axis in-plane displacements, comprising a sensor head, 2-dimensional planar grating, dual-axis processor and interface cable;
 

Where the owner name is not linked, that owner no longer owns the brand

   
Technical Examples
  1. A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.