TOOLS CLEANING CONDITIONING

Brand	Owner (click to sort)	Address	Description
ARIES	FSI INTERNATIONAL, INC.	3455 Lyman Boulevard, MS4-8448 Chaska MN 553183052	tools for cleaning and conditioning the surfaces of electronic devices, namely, semiconductor processing apparatus utilizing cryogenic aerosols for cleaning semiconductors during integrated circuit fabrication;
ICE	FSI INTERNATIONAL, INC.	3455 Lyman Boulevard, MS4-8448 Chaska MN 553183052	tools for cleaning and conditioning the surfaces of electronic devices, namely semiconductor processing equipment for cleaning semiconductors during integrated circuit fabrication;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Embodiments of a conditioning head for in-situ conditioning and/or cleaning a processing pad of a CMP, ECMP, or other processing system are provided. In one embodiment, the conditioning head includes a brush disposed in a central cavity. A cleaning fluid is provided through the central cavity of the conditioning head to a processing pad. The brush spins and moves laterally across the surface of the processing pad. The cleaning solution dispensed through the conditioning head dissolves by-products of the processing operation while the brush gently wipes the processing pad. A lip of the conditioning head retains the cleaning fluid and cleaning waste, thereby minimizing contamination of the area outside of the conditioning head. The cleaning waste is removed from the processing pad via passages formed near the outer periphery of the conditioning head.