THICKNESS GAUGES FOR MEASURING

Brand	Owner (click to sort)	Address	Description
ELCOMETER	ELCOMETER LIMITED	Edge Lane Manchester M43 6BU United Kingdom	THICKNESS GAUGES FOR MEASURING AND CHECKING SURFACE COATINGS;
INSPECTOR	ELCOMETER INSTRUMENTS LIMITED	FAIRFIELD ROAD DROYLSDEN, MANCHESTER	THICKNESS GAUGES FOR MEASURING AND CHECKING SURFACE COATINGS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A thickness of a wafer during polishing operation is detected to accurately perform the polishing. A thickness measuring method, which measures the thickness of the wafer of wafer 7 in polishing a surface, comprises the steps of irradiating the thin film-like material during the surface polishing from a backside with probe light, measuring a reflectance spectrum with a dispersion type multi-channel spectroscope using a photodiode array which has particularly high sensitivity to light having a wavelength ranging from 1 to 2.4 ?m, and calculating the thickness on the basis of a wave form of the reflectance spectrum. The surface polishing is performed while the thickness of the wafer 7 is measured by the above-described thickness measuring method, and the polishing is finished when the thickness of the wafer 7 reaches a target thickness.