SPECTROSCOPIC EQUIPMENT

Brand	Owner (click to sort)	Address	Description
SPECTROPAC	Baird Corporation	Bedford MA	Spectroscopic Equipment;
SPECTROPAC	Braid-Atomic, Inc.	33 UNIVERSITY ROAD Cambridge MA	Spectroscopic Equipment;
SPECTROVAC	BAIRD CORPORATION	125 MIDDLESEX TURNPIKE BEDFORD MA 01730	SPECTROSCOPIC EQUIPMENT;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Before the diffraction from a diffracting structure on a semiconductor wafer is measured, where necessary, the film thickness and index of refraction of the films underneath the structure are first measured using spectroscopic reflectometry or spectroscopic ellipsometry. A rigorous model is then used to calculate intensity or ellipsometric signatures of the diffracting structure. The diffracting structure is then measured using a spectroscopic scatterometer using polarized and broadband radiation to obtain an intensity or ellipsometric signature of the diffracting structure. Such signature is then matched with the signatures in the database to determine the grating shape parameters of the structure.