SPECTROMETERS MICRO ANALYSIS

Brand	Owner	Address	Description
MAXRAY	NORAN INSTRUMENTS INC.	2551 West Beltline Highway Middleton WI 535622697	spectrometers for micro analysis of samples, utilizing parallel beam spectrometry in analysis of x-rays;MAX RAY;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

After completion of an arbitrary device process, an apparatus for micro-sample extraction extracts a part of a wafer as a micro-sample of a size equal to or larger than a repetition pattern with a probe and places the extracted micro-sample to a micro-sample storage, and the micro-sample storage is stored into an apparatus for micro-sample storage. The wafer is subjected to a post process and an observation desired position is determined in response to a failure analysis requirement. After that, the micro-sample is unloaded from the micro-sample storage by an apparatus for additional processing of the micro-sample and is placed onto an observation sample holder. By performing an additional process in the observation desired position, a failure analysis sample is prepared, and analysis information obtained by an apparatus for failure analysis is output.