SPECIMEN GRIDS FOR ELECTRON MICROSCOPY

Brand	Owner	Address	Description
SLIM BAR	STRUCTURE PROBE, INC.	569 East Gay Street P.O. Box 656 West Chester PA 193810656	SPECIMEN GRIDS FOR ELECTRON MICROSCOPY;BAR;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

In various embodiments, techniques are described for combining an X-ray detector (e.g., for providing EPMA) and an electron detector (e.g., for providing AES) to provide a tool for determining film compositions and thicknesses on a specimen, such as a semiconductor structure or wafer. In one embodiment, a system includes a beam generator configurable to direct an electron beam towards a specimen. The electron beam may generate Auger electrons and X-rays. The system may also include at least one electron detector disposed adjacent to (e.g., above) the specimen to detect electrons and measure their energies emanating from a top layer of the specimen. One or more X-ray detectors may be disposed adjacent to the specimen to detect X-rays.