SOLUBLE POLYMER FILM INDUSTRIAL

Brand Owner Address Description
CM-SECUBAG CHEMETALL GMBH Trakehner Straße 3 Frankfurt 60487 Germany soluble polymer film for industrial and commercial packing use for air-sensitive and/or water sensitive substances;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A water-soluble material used for forming a water-soluble film on a chemically amplified resist film includes a water-soluble polymer, an acid generator and a compound constructing an inclusion compound for incorporating the acid generator. Also, in a pattern formation method, a chemically amplified resist film is formed on a substrate, and a water-soluble film made of a water-soluble material including a water-soluble polymer, an acid generator and a compound constructing an inclusion compound for incorporating the acid generator is formed on the resist film. Thereafter, pattern exposure is carried out by selectively irradiating the resist film with exposing light through the water-soluble film, the resultant resist film is developed and the water-soluble film is removed. Thus, a resist pattern made of the resist film is formed.