SOLEIL TECH

Brand	Owner	Address	Description
SOLTECH	Soleil Systems, Inc.	360 SCOTT ST. ELK GROVE IL 60007	SOLEIL TECH;IC 011 US 013 021 023 031 034 GandS-- TANNING BEDS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

An optical reduction system with polarization dose sensitive output for use in the photolithographic manufacture of semiconductor devices having variable compensation for reticle retardation before the long conjugate end. The variable compensation component(s) before the reticle provides accurate adjustment of the polarization state at or near the reticle. The variable compensation components can be variable wave plates, layered wave plates, opposing mirrors, a Berek's compensator and/or a Soleil-Babinet compensator. The catadioptric optical reduction system provides a relatively high numerical aperture of 0.7 capable of patterning features smaller than 0.25 microns over a 26 mmÃ—5 mm field. The optical reduction system is thereby well adapted to a step and scan microlithographic exposure tool as used in semiconductor manufacturing. Several other embodiments combine elements of different refracting power to widen the spectral bandwidth which can be achieved.