SOFTWARE WAVEFORM MEASUREMENT

Brand	Owner	Address	Description
PRECISION MEASURING MATRIX	DIGITAL HARMONIC	6031 University Boulevard, Suite 235 Ellicott City MD 21043	Software for waveform measurement, analysis, visualization, and characterization; software for signal processing;Providing temporary use of non-downloadable software for waveform measurement, analysis, visualization, and characterization; providing temporary use of non-downloadable software for signal processing;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Disclosed is a scanning electron microscope (SEM) for realizing high-precision dimension measurement of a sample, such as an ArF exposure photoresist, that requires the measurement of a dimension by a low S/N signal waveform. To this end, partial waveforms (or partial images) of sample signal waveforms (or an images) acquired from a dimension measurement target sample and a sample material of the same kind are registered in advance, a measurement target signal waveform (or an image) obtained from the dimension measurement target sample and the sample registration waveform are combined, and a dimension of the dimension measurement target pattern is calculated based on the combination result.