SILEX MICRO SYSTEMS

Brand	Owner	Address	Description
SILEX MICROSYSTEMS	Silex Microsystems AB	Box 595 Järfälla 17526 Sweden	SILEX MICRO SYSTEMS;MICROSYSTEMS;Product development and design consulting services as well as computer hardware and software consulting services all in the field of industrial applications in the nature of micro electro-mechanical or MEMS devices, systems and components, and other devices, systems and components having micro-scale or meso-scale features, comprised of mechanical, electrical,optical, fluidic elements, or any combination thereof;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method is described for closing openings in a film, for example, in microelectronic process technology, whereby substantially no deposition material passes through the openings, which can be important if fragile micro devices are positioned under the openings. The closure of these openings can cause an underlying cavity to be hermetically sealed, in which an object can be located. In particular the method provides a way for hermetically sealing cavities under controlled atmosphere and pressure in the encapsulation and sealing processes of cavities comprising fragile content. The cavities may comprise for example Micro Electro Mechanical Systems (MEMS). The method may be used for encapsulating devices which may require a controlled atmosphere and pressure encapsulation such as micro accelerometers, micro gyroscopes, micro tubes, vibration micro sensors, micro mirrors, micro mechanical resonators or "resonant strain gauges", micro mechanical filters, micro switches, micro electrical circuits, micro relays, Integrated Circuits with air gaps etc.