SIGNAL SENSOR EQUIPMENT

Brand	Owner (click to sort)	Address	Description
PRIVACY GUARD	INTERDIGITAL COMMUNICATIONS CORPORATION	781 Third Avenue King of Prussia PA 194061409	Signal and sensor equipment, software and systems for controlling the operability or functionality of other devices, equipment or systems; software, services, or equipment for others to control the operability or functionality of other devices, equipment or systems;
PRIVACY SHIELD	INTERDIGITAL COMMUNICATIONS CORPORATION	781 Third Avenue King of Prussia PA 194061409	Signal and sensor equipment, software and systems for controlling the operability or functionality of other devices, equipment or systems; software, services, or equipment for others to control the operability or functionality of other devices, equipment or systems;
PRIVACY SPHERE	INTERDIGITAL COMMUNICATIONS CORPORATION	781 Third Avenue King of Prussia PA 194061409	Signal and sensor equipment, software and systems for controlling the operability or functionality of other devices, equipment or systems; software, services, or equipment for others to control the operability or functionality of other devices, equipment or systems;
PRIVACY ZONE	INTERDIGITAL COMMUNICATIONS CORPORATION	781 Third Avenue King of Prussia PA 194061409	Signal and sensor equipment, software and systems for controlling the operability or functionality of other devices, equipment or systems; software, services, or equipment for others to control the operability or functionality of other devices, equipment or systems;
PRIVACYZONE	INTERDIGITAL COMMUNICATIONS CORPORATION	781 Third Avenue King of Prussia PA 194061409	Signal and sensor equipment, software and systems for controlling the operability or functionality of other devices, equipment or systems; software, services, or equipment for others to control the operability or functionality of other devices, equipment or systems;PRIVACY ZONE;
ZONE OF PRIVACY	INTERDIGITAL COMMUNICATIONS CORPORATION	781 Third Avenue King of Prussia PA 194061409	Signal and sensor equipment, software and systems for controlling the operability or functionality of other devices, equipment or systems; software, services, or equipment for others to control the operability or functionality of other devices, equipment or systems;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

In one aspect, the present invention is a sensor unit for sensing process parameters of a process to manufacture an integrated circuit using integrated circuit processing equipment. In one embodiment, the sensor unit includes a substrate having a wafer-shaped profile and a first sensor, disposed on or in the substrate, to sample a first process parameter. The sensor unit of this embodiment also includes a second sensor, disposed on or in the substrate, to sample a second process parameter wherein the second process parameter is different from the first process parameter. In one embodiment, the sensor unit includes a first source, disposed on or in the substrate, wherein first source generates an interrogation signal and wherein the first sensor uses the interrogation signal from the first source to sample the first process parameter. The sensor unit may also include a second source, disposed on or in the substrate, wherein second source generates an interrogation signal and wherein the second sensor uses the interrogation signal from the second source to sample the second process parameter. The first sensor and the first source may operate in an end-point mode or in a real-time mode. In this regard, the first sensor samples the first parameter periodically or continuously while the sensor unit is disposed in the integrated circuit processing equipment and undergoing processing. In one embodiment, the first sensor is a temperature sensor and the second sensor is a pressure sensor, a chemical sensor, a surface tension sensor or a surface stress sensor.