SEMICONDUCTOR THIN FILM PROCESSING

Brand Owner Address Description
LIGHTSTREAM Photon Dynamics, Inc. 17 GREAT OAKS BOULEVARD TRADEMARKS RTP SAN JOSE CA 951191202 SEMICONDUCTOR AND THIN FILM PROCESSING MACHINES, NAMELY, RAPID THERMAL PROCESSING AND ANNEALING MACHINES;LIGHT STREAM;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. There is provided a technique to form a single crystal semiconductor thin film or a substantially single crystal semiconductor thin film. An amorphous semiconductor thin film is irradiated with ultraviolet light or infrared light, to obtain a crystalline semiconductor thin film (102). Then, the crystalline semiconductor thin film (102) is subjected to a heat treatment at a temperature of 900 to 1200° C. in a reducing atmosphere. The surface of the crystalline semiconductor thin film is extremely flattened through this step, defects in crystal grains and crystal grain boundaries disappear, and the single crystal semiconductor thin film or substantially single crystal semiconductor thin film is obtained.