POLISHING WAX COMBINATION COATING

Brand	Owner	Address	Description
WESTWAX	WEST DISINFECTING COMPANY	NEW YORK, N.Y. LONG ISLAND CITY, N.Y.	POLISHING WAX AND COMBINATION COATING AND POLISHING WAX;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method for chemical mechanical polishing (CMP) wafers having high aspect ratio surface topography. A wafer is positioned on a plate. A polishing pad is coupled to a platen. A polishing solution (e.g., slurry) is added between the polishing pad and the wafer. CMP is performed on the wafer by creating a relative movement between the polishing pad and the wafer. The polishing pad removes substantially all residual material from the channels. To accomplish this, the polishing pad has a compressibility of at least 5% at a polishing pressure of about 4 psi.