PHOTOSENSITIVE FILM

Brand	Owner (click to sort)	Address	Description
FOR THE FUN OF IT	EASTMAN KODAK COMPANY	343 State Street Rochester NY 14650	PHOTOSENSITIVE FILM;
MACROMASTER	E.I. DU PONT DE NEMOURS AND COMPANY	DuPont Legal Trademark & Copyright Group 1007 Market Street Wilmington DE 19898	PHOTOSENSITIVE FILM;
THERMACHROME	SCOTT PAPER COMPANY	Delaware County PA	PHOTOSENSITIVE FILM;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

The method includes forming an isolation film on a silicon substrate to define an active region; forming an antireflective film on an entire surface of the substrate containing the isolation film; forming a photosensitive film pattern on the antireflective film while exposing a portion of the isolation film or the active region adjacent to the isolation film; etching the antireflective film, the isolation film, and the substrate by using the photosensitive film pattern as an etching mask to recess the active region; performing a light etch treatment on a substrate resultant without removing the remaining photosensitive film pattern, so as to remove a damaged layer and a carbon pollutant formed on a surface of the recessed active region; and removing the remaining photosensitive film pattern and the antireflective film.