PHOTOLITHOGRAPHY APPARATUS USED IN

Brand	Owner (click to sort)	Address	Description
ALS LASERSTEP	GENERAL SIGNAL TECHNOLOGY CORPORATION	700 TERRACE POINT DRIVE MUSKEGON MI 49443	PHOTOLITHOGRAPHY APPARATUS USED IN THE MANUFACTURE OF MICRO-ELECTRONIC CIRCUITS;ALS LASER STEP;LASERSTEP;
ALS WAFERSTEP	INTEGRATED SOLUTIONS, INC.	P.O. Box 145024 Coral Gables FL 33114	PHOTOLITHOGRAPHY APPARATUS USED IN THE MANUFACTURE OF MICRO-ELECTRONIC CIRCUITS;ALS WAFER STEP;WAFERSTEP;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A pattern control system for cooling a wafer prior to a photolithography exposure step. The pattern control system includes a wafer transfer pathway for transferring the wafer in a photolithography process and at least one cooling module provided along the wafer transfer pathway for cooling the wafer. Cooling of the wafers prevents thermal distortion of circuit pattern images formed in a photoresist layer on the wafer during a subsequent photolithography exposure process.