OPTICAL INSPECTION DEVICE COMPRISED

Brand Owner (click to sort) Address Description
MICROAE KLA-TENCOR CORPORATION One Technology Drive Milpitas CA 95035 OPTICAL INSPECTION DEVICE COMPRISED OF AT LEAST TWO ELLIPSOMETERS AND A MICROPROCESSOR, FOR USE IN MONITORING CHARACTERISTICS OF SEMICONDUCTORS DURING FABRICATION;
µAE KLA-TENCOR CORPORATION One Technology Drive Milpitas CA 95035 OPTICAL INSPECTION DEVICE COMPRISED OF AT LEAST TWO ELLIPSOMETERS AND A MICROPROCESSOR, FOR USE IN MONITORING CHARACTERISTICS OF SEMICONDUCTORS DURING FABRICATION;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. An inspection system, and process for use thereof, for inspecting semiconductors or like substrates. The inspection system includes an inspection device and an auxiliary sensor apart from the inspection device. The auxiliary sensor is used to collect height data and generate a map of a semiconductor or like substrate to aids in focusing the inspection device.