OPTICAL PROBE SENSOR FOR USE

Brand	Owner	Address	Description
QUALIFIBER	DOLAN-JENNER INDUSTRIES, INC.	760 Beta Drive Unit F Mayfield Village OH 44143	OPTICAL PROBE SENSOR FOR USE IN GAGING AND MEASUREMENT APPLICATIONS;QUALITY FIBER;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light to/from the top of the wafer. During the optical testing, the vertical spacing between an optical probe and the wafer is set to a very close distance, to achieve efficient optical coupling. It is beneficial to keep this close distance during optical testing as a constant in testing different optical components at different locations on the wafer. In one implementation, a spacing sensor may be used to measure the height of the optical probe from the wafer surface. This sensor may be a capacitance sensor that is mounted at the optical probe.