OPTICAL MEASUREMENT SYSTEM COMPRISING

Brand Owner (click to sort) Address Description
OTM GOU Lite Ltd. 24 Tchernichovsky Street, Suite 307 Kfar Sava 44271 Israel OPTICAL MEASUREMENT SYSTEM COMPRISING A LASER FOR MEASURING PURPOSES, A PHOTO DETECTOR, AND A SIGNAL PROCESSOR;OPTICAL MEASUREMENT;
REALTIME CD KLA-TENCOR CORPORATION One Technology Drive Milpitas CA 95035 OPTICAL MEASUREMENT SYSTEM COMPRISING A LIGHT SOURCE, A DETECTOR AND A PROCESSOR FOR EVALUATING MICROSCOPIC GEOMETRIC FEATURES ON SEMICONDUCTOR WAFER;REAL TIME CD;CD;
RTCD KLA-TENCOR CORPORATION One Technology Drive Milpitas CA 95035 Optical measurement system comprising a light source, a detector and a processor for evaluating microscopic geometric features on semiconductor wafers;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A scanning exposure apparatus includes a projection optical system, a stage to move while holding a substrate, a measurement system to measure a position of the substrate in an optical axis direction of the projection optical system, a generation system to generate a driving signal, in which a change amount being controlled to be equal to or less than an upper limit value, to the stage based on the result of measurement by the measurement system, and a setting system to set the upper limit value based on a running status of the stage.