NOVA RESIST

Brand	Owner	Address	Description
NOVARESIST	SHELDAHL, INC.	1150 Sheldahl Road Northfield MN 550570170	NOVA-RESIST;coating for use in connection with flexible printed circuit fabrication;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

The invention relates to a resist for electron beam lithography and to a process for producing photomasks for optical lithography. The inventive resist includes repeating units that are derived from maleic anhydride and that can act as an anchor group for the subsequent binding of silicon-containing groups. The etch stability of the resist can thus be subsequently increased so that there is no dimensional loss on transfer of the resist structure to a chromium layer arranged under the resist.