MICROWAVE PLASMA GENERATOR UNITS

Brand Owner Address Description
ASTEX MKS INSTRUMENTS, INC. 2 Tech Drive, Suite 201 Andover MA 01810 MICROWAVE PLASMA GENERATOR UNITS AND COMPONENT PARTS THEREFOR FOR USE IN INDUSTRIAL AND SCIENTIFIC APPLICATIONS;ASTECH;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. Systems and methods for generating relatively cool microwave plasma. The present invention provides a microwave plasma nozzle that includes a gas flow tube through which a gas flows, and a rod-shaped conductor that is disposed in the gas flow tube and has a tapered tip near the outlet of the gas flow tube. A portion of the rod-shaped conductor extends into a microwave cavity to receive microwaves passing in the cavity. These received microwaves are focused at the tapered tip to heat the gas into plasma. The microwave plasma nozzle also includes a vortex guide between the rod-shaped conductor and the gas flow tube imparting a helical shaped flow direction around the rod-shaped conductor to the gas flowing through the tube. The microwave plasma nozzle further includes a mechanism for electronically exciting the gas and a shielding mechanism for reducing a microwave power loss through the gas flow tube.