METROLOGY TOOLS CHARACTERIZING

Brand Owner Address Description
USE THE STANDARD LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 metrology tools for characterizing the properties of illumination sources of photolithography steppers and step-and-scan apparatus for semiconductors; interferometers for fabricating semiconductors;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A processing apparatus for processing a microelectronic workpiece includes a metrology unit and a control, signal-connected to the metrology unit. The control can modify a process recipe or a process sequence of the processing apparatus based on a feed forward or a feed back signal from the metrology unit. A seed layer deposition tool, a process layer electrochemical deposition tool, and a chemical mechanical polishing tool, arranged for sequential processing of a workpiece, can be controlled as an integrated system using one or more metrology units. A metrology unit can be located at each tool to measure workpiece parameters. Each of the metrology units can be used as a feed forward control and/or a feed back control at each of the tools.