METAL CLEANING DESCALING PREPARATION

Brand	Owner (click to sort)	Address	Description
ALKA-2000	MERCK & CO., INC.	Rahway NJ	metal cleaning and descaling preparation;
GEO-GUARD	CHEMETALL US, INC.	675 CENTRAL AVENUE NEW PROVIDENCE NJ 07974	metal cleaning and descaling preparation;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Disclosed are a method for cleaning a deposition chamber by removing attached metal oxides, and a deposition apparatus for performing in situ cleaning. A first gas and a second gas are provided into the deposition chamber. The first gas is reacted with metal included in the metal oxide to generate reacting residues. The second gas then decomposes the reacting residues, and the decomposed residues are exhausted out of the chamber. Thus, this cleaning process can be rapidly accomplished while the deposition chamber is not opened or separated from a deposition apparatus.