MACHINES APPLYING ANTI REFLECTIVE COATINGS

Brand Owner (click to sort) Address Description
APOGEE Apogee Enterprises, Inc. 4400 West 78th Street, Suite 520 Minneapolis MN 55435 Machines for Applying Anti-reflective Coatings for Cathode Ray Tube Displays;
OPTIUM VIRATEC THIN FILMS, INC. 2150 Airport Drive Faribault MN 550217798 Machines for applying anti-reflective coatings for cathode ray tube (CRT) displays;Coatings, namely anti-reflective (A/R) coatings for cathode ray tube (CRT) displays;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A cross-linking polymer for an organic anti-reflective coating that is able to improve the uniformity of an ultra-fine photoresist pattern formed using a photolithography process and an ArF light source with 194 nm wavelength. Organic anti-reflective coatings including the same and a method for forming a photoresist pattern using the same are also disclosed. The disclosed cross-linking polymer is capable of preventing scattered reflection from a bottom film layer, eliminating standing wave effect due to alteration of thickness of the photoresist film, and increasing uniformity of the thickness of photoresist pattern. At the same time, the disclosed cross-linking pattern increases the etching velocity of the organic anti-reflective coating so that it can be easily removed.