LEAK DETECTORS INCORPORATING VACUUM PUMPS

Brand	Owner (click to sort)	Address	Description
A-VAC	A-VAC INDUSTRIES, INC.	1845 S. LEWIS STREET ANAHEIM CA 92805	LEAK DETECTORS INCORPORATING VACUUM PUMPS FOR DETECTING LEAKS; VACUUM PUMP ACCESSORIES, NAMELY, VACUUM GAUGES AND LEAK DETECTOR ACCESSORIES, NAMELY, LEAK DETECTOR FILAMENTS, LEAK STANDARDS WHICH ARE CALIBRATORS USED TO CALIBRATE THE LEAK DETECTOR, SOURCE ASSEMBLIES AND OTHER REPLACEMENT COMPONENTS OF LEAK DETECTORS, NAMELY, LIGHT BULBS, GAUGES, CIRCUIT BOARDS, O-RINGS AND SEALS ALL SOLD AS A UNIT;VACUUM PUMPS; VACUUM PUMP ACCESSORIES, NAMELY, VACUUM PUMP FILTERS AND VACUUM PUMP REPAIR KITS COMPOSED OF GASKETS, SEALS, SPRINGS, EXHAUST VALVES, BEARINGS, BUSHINGS, AND VANES;A VAC;
PHOENIXL	LEYBOLD GMBH	Bonner Straße 498 Köln 50968 Germany	Leak detectors incorporating vacuum pumps for detecting leaks;
PHOENIXL	Leybold Vacuum GmbH	Bonner Strasse 498 50968 Köln Germany	Leak detectors incorporating vacuum pumps for detecting leaks;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the chamber has been opened to atmosphere for the purpose of wet cleaning or component replacement, the apparatus comprises a high precision absolute pressure gauge for use in processing, a wide range gauge capable of measuring a wide range of pressures, and a controller, wherein the controller uses a pressure trend during vacuum evacuation to determine whether the vacuum evacuation is satisfactory, and starts aging upon determining that the vacuum evacuation is satisfactory even if the actual pressure is not below a prescribed value. The controller determines relationship between an apparent flow rate (leak rate) measured by the absolute pressure gauge when the chamber is vacuum sealed, and a chamber pressure measured by the wide range gauge, and then measures only the pressure to determine whether a baseline leak rate is reached.