INSTRUMENTS CONTROLLING CONCENTRATION

Brand Owner Address Description
AUTOSOLVER DEXTER CORPORATION, THE WINDSOR LOCKS CONN instruments for controlling the concentration of developers and strippers in resist developing and stripping processes;AUTO SOLVER;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. Disclosed are a method and an apparatus for treating an effluent containing ammonia in which method and apparatus N2O concentration in the gas at the outlet of a catalyst tower does not rise to a high level even when the NH3 concentration in the effluent was reduced and the amount of hazardous substances formed is small; in the method and apparatus, an NH3-containing effluent A and a carrier gas (steam C and combustion gas F) are contacted in stripping tower 7 to transfer the NH3 from the NH3-containing effluent to a gas phase, the gas containing the generated NH3 is heated with pre-heater 19 and then contacted with catalyst layer 13 placed in catalyst tower 12 to decompose the NH3 into nitrogen and water; and at that time, the oxygen concentration in the gas to be introduced into catalyst tower 12 and the N2O concentration in the gas discharged from catalyst tower 12 are determined by measuring instruments 21 and 22, respectively, and the oxygen concentration in the gas to be introduced into catalyst tower 12 is adjusted by adjusting valve 17 so that the N2O concentration becomes within a prescribed range.