INDUSTRIAL ION IMPLANTER SURFACE

Brand	Owner (click to sort)	Address	Description
TRIION	Unimerco A/S	DREJERVEJ 2 SUNDS DK-7451 Denmark	Industrial ion implanter for surface treatment of inorganic materials for use within the automobile and aircraft industry, and for surface treatment of machine cutting tools and casting molds; computer software for operating industrial ion implanters;
TRIION	UNIMERCO GROUP A/S	Drejervej 2 DK-7451 Sunds Denmark	Industrial ion implanter for surface treatment of inorganic materials for use within the automobile and aircraft industry, and for surface treatment of machine cutting tools and casting molds; computer software for operating industrial ion implanters;
TRIION	TRIION A/S	Mollehaven 31 DK-4040 Jyllinge Denmark	Industrial ion implanter for surface treatment of inorganic materials for use within the automobile and aircraft industry, and for surface treatment of machine cutting tools and casting molds; computer software for operating industrial ion implanters;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method for monitoring an ion implanter is disclosed. In one embodiment, the method comprises providing a wafer, forming a barrier layer on the surface of the wafer wherein the barrier layer has a substantial blocking effect on ion implantation, performing an ion implantation process to the wafer, performing a thermal treatment process, removing the barrier layer, and measuring a physical property of the wafer. The measured physical property of the wafer can be used to ascertain the status of the ion implanter. For instance, the measured physical property can be used to determine whether the ion implanter has problems when the energy or concentration of the implanted ions is changed.