GALLON INTERNAL COLLECTOR STORAGE

Brand	Owner	Address	Description
CORNELL 480	Cornell Energy, Inc.	245 S. Plumer Ave. Tucson AZ 85719	42 Gallon Internal Collector Storage Type Solar Water Heaters;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a temperature sufficient to remove deposited debris from the mirror. In another aspect, a device is disclosed for removing plasma generated debris from an EUV light source collector mirror having a different debris deposition rate at different zones on the collector mirror. In a particular aspect, an EUV collector mirror system may comprise a source of hydrogen to combine with Li debris to create LiH on a collector surface; and a sputtering system to sputter LiH from the collector surface. In another aspect, an apparatus for etching debris from a surface of a EUV light source collector mirror with a controlled plasma etch rate is disclosed.