EMULATOR SEMICONDUCTOR LITHOGRAPHIC

Brand Owner Address Description
PREDICTIVELITHOGRAPHY LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 An emulator for semiconductor lithographic projection tools (steppers and scanners) that combines precise characterization of the tool using in-situ hardware and a computer simulation program utilizing above characterizations;PREDICTIVE LITHOGRAPHY;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method of controlling lithographic overlay offsets in the manufacture of semiconductor devices from wafers, comprising the steps of forming a lithographic pattern on a wafer layer with a lithographic tool, processing the wafer after the pattern is formed to enable fabrication of a semiconductor device, predicting overlay offset corrections based on one or more factors involved in the processing of the wafer, and utilizing the predicted overlay offset corrections to positionally control the lithographic tool.