DEPOSITION SYSTEMS PRODUCTION

Brand	Owner	Address	Description
LUMINA	VEECO INSTRUMENTS INC.	1 Terminal Drive Plainview NY 11803	deposition systems for the production of LED lights, advanced LED lights, and photonics applications comprised of wafer handlers, gas delivery equipment, reaction chambers;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A vacuum deposition system has been designed to produce thin film based demultiplexers with high throughput and production yields of greater than 25% for use in Dense Wavelength Division Multiplexer (DWDM) systems. The system employs a dense array of high yield fixtures and an ion assisted movable dual electron beam evaporation system. The fixture array increases acceptable yields of narrow band pass filters to 25-75% compared to less than 5% in conventional coating systems used for DWDM. The movable e-beam system allows critical symmetry to be maintained while eliminating significant delays resulting from deposition of two materials from a single electron gun. The vacuum deposition system will enable production of more than 15,000 50-200 GHZ filters which meet specifications for DWDM demultiplexers every 48 hours.