COMBINATION LUBRICANT INSULATING FILM

Brand	Owner (click to sort)	Address	Description
SLICK	TOTAL SPECIALTIES USA, INC.	5 NORTH STILES STREET LINDEN NJ 07036	Combination Lubricant and Insulating Film Compound Used in Molds Between Iron and Glass to Reduce the Tendency of Checks in the Manufacture of Glass Products;
SLICK	SPECIALTY PRODUCTS CO.	190 WARREN ST. JERSEY CITY NJ	Combination Lubricant and Insulating Film Compound Used in Molds Between Iron and Glass to Reduce the Tendency of Checks in the Manufacture of Glass Products;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A first insulating film, a second insulating film, a third insulating film, an antireflective film, and a resist film are formed in this order on a lower-layer wiring. After dry etching the third insulating film and the second insulating film, using the resist film as a mask, the resist film and the antireflective film are removed by ashing. Thereafter, the first insulating film is dry etched, using the third insulating film as a mask, to form a wiring trench extending to the lower-layer wiring. The dry etching of the third insulating film and the second insulating film is performed using a gas containing fluorine at a pressure of 0.1 Pa to 4 Pa. Ashing is preferably performed using at least one of hydrogen and an inert gas.