CHEMISTRY APPARATUS THEIR PARTS

Brand Owner Address Description
XEGMENTAL SHELL CASALE SA Via Giulio Pocobelli 6 CH-6900 Lugano Switzerland Chemistry apparatus and their parts, namely, reactors for use in high temperature chemical reactions;Heat exchangers for chemical treatments;SHELL;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A plasma processing system for and method of utilizing an improved etch chemistry for effectively etching high aspect ratio silicon features. The process chemistry employs precursor gases suitable for producing a fluorine/chlorine etch chemistry as well as precursor gases suitable for forming chemical bonds of sufficient strength to create stable feature side-walls. The improved process chemistries include SO2/SF4/SiCl4, SO2/SF4/Cl2, SO2/SiF4/SiCl4, SO2SIF4/Cl2, O2/F2/Cl2, N2 O/F2/Cl2, and NO2/F2/Cl2-based chemistries.