CHEMICAL CLEANING SOLUTION FOR ALUMINUM

Brand	Owner	Address	Description
ESPREE	BLUE CORAL-SLICK 50, LTD.	1385 West 2200 South, Salt Lake City UT 84119	CHEMICAL CLEANING SOLUTION FOR ALUMINUM AUTOMOBILE WHEELS (SO-CALLED MAG WHEELS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

An antimicrobial cleaning composition and methods for cleaning semiconductor substrates, particularly after chemical mechanical planarization or polishing, are provided. In one embodiment, the cleaning composition combines a solvent, a cleaning agent such as a hydroxycarboxylic acid or salt thereof, and at least one antimicrobial agent resulting in a cleaning composition in which microbial growth is inhibited. Examples of suitable antimicrobial agents include a benzoic acid or salt such as potassium or ammonium benzoate, and sorbic acid or salt such as potassium sorbate. The composition is useful for cleaning a wafer and particularly for removing residual particles after a conductive layer has been planarized to a dielectric layer under the conductive layer in a chemical mechanical planarization of a semiconductor wafer with abrasive slurry particles, particularly after a CMP of copper or aluminum films. Use of the cleaning composition advantageously inhibits microbial growth in the cleaning solution and deposition on the cleaned planarized surface.