CALIBRATION METHOD SOFTWARE UTILIZING ELECTRONIC

Brand	Owner	Address	Description
GEOWALK	IMSI/Design	25 Leveroni Court, Suite B Novato CA 94949	Calibration method software utilizing electronic device sensor attributes such as gyroscopes, accelerometers, or Global Positioning Systems (GPS), used to more accurately determine geo-location;GEO WALK;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method for generating a photolithography mask for optically transferring a pattern formed in the mask onto a substrate utilizing an imaging system. The method includes the steps of: (a) defining a set of calibration patterns, which are represented in a data format; (b) printing the calibration patterns on a substrate utilizing the given imaging system; (c) determining a first set of contour patterns corresponding to the calibration patterns imaged on the substrate; (d) generating a system pseudo-intensity function, which approximates the imaging performance of the imaging system; (e) determining a second set of contour patterns by utilizing the system pseudo-intensity function to define how the calibration patterns will be imaged in the substrate; (f) comparing the first set of contour patterns and the second set of contour patterns to determine the difference therebetween; (g) adjusting the system pseudo-intensity function until the difference between the first set of contour patterns and the second set of contour patterns is below a predefined criteria; and (h) utilizing the adjusted system pseudo-intensity function to modify the mask so as to provide for optical proximity correction.