AUTOMATIC WAFER HANDLER TRANSPORT

Brand Owner (click to sort) Address Description
AEROLOADER BROOKS AUTOMATION, INC. 15 Elizabeth Drive Chelmsford MA 01824 Automatic wafer handler for transport of semiconductor wafers in a semiconductor manufacturing facility;AERO LOADER;
CONTINUUM INTEVAC, INC. 3560 Bassett Street Santa Clara CA 95054 Automatic wafer handler for transport of semiconductor wafers in a semiconductor wafer processing equipment and components thereof, namely, vacuum transport chamber with robotic wafer handling equipment for transporting wafers to and from semiconductor processing reactors, and parts and accessories thereof;
LEAN INTEVAC, INC. 3560 Bassett Street Santa Clara CA 95054 Automatic wafer handler for transport of semiconductor wafers in a semiconductor wafer processing equipment and components thereof, namely, vacuum transport chamber with robotic wafer handling equipment for transporting wafers to and from semiconductor processing reactors, and parts and accessories thereof;
LEAN PLATFORM INTEVAC, INC. 3560 Bassett Street Santa Clara CA 95054 Automatic wafer handler for transport of semiconductor wafers in a semiconductor wafer processing equipment and components thereof, namely, vacuum transport chamber with robotic wafer handling equipment for transporting wafers to and from semiconductor processing reactors, and parts and accessories thereof;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A process chamber includes an opening, two or more stacked cold plates adjacent the opening, two or more stacked hot plates adjacent the cold plates, and a rotatable wafer transport capable of moving a wafer between the cold plates and between the hot plates for processing of the wafer. The wafer can be rapidly heated while between the hot plates. The wafer transport has perpendicular walls about a pivot such that when the wafer is between the cold plates or between the hot plates, one of the walls separates the cold and hot portions, thereby increasing the efficiency of cooling and heating.