APPLYING ANTI REFLECTIVE COATINGS

Brand Owner (click to sort) Address Description
EASY-VUE JOSEPH E. BERG, DOING BUSINESS AS BERG INDUSTRIES 108 N. ROSELAKE AVE. 90026 LOS ANGELES CA 90026 APPLYING OF ANTI-REFLECTIVE COATINGS TO GLASS, METALLIC AND POLYMER SURFACES;EASY-VIEW;
EASY-VUE Berg Industries, Incorporated 3376 W. First St. Los Angeles CA 90004 Applying of Anti-Reflective Coatings to Glass, Metallic and Polymer Surfaces;EASY-VIEW;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A cross-linking polymer for an organic anti-reflective coating that is able to improve the uniformity of an ultra-fine photoresist pattern formed using a photolithography process and an ArF light source with 194 nm wavelength. Organic anti-reflective coatings including the same and a method for forming a photoresist pattern using the same are also disclosed. The disclosed cross-linking polymer is capable of preventing scattered reflection from a bottom film layer, eliminating standing wave effect due to alteration of thickness of the photoresist film, and increasing uniformity of the thickness of photoresist pattern. At the same time, the disclosed cross-linking pattern increases the etching velocity of the organic anti-reflective coating so that it can be easily removed.