ALUMINOUS METAL EXTRUSIONS HAVING THEREIN

Brand	Owner	Address	Description
CLIMATE GUARD	REYNOLDS METALS COMPANY	Richmond VA	ALUMINOUS METAL EXTRUSIONS HAVING THEREIN A SOLIDIFIED RESINOUS BARRIER THAT THERMALLY INSULATES ONE METAL PORTION FROM ANOTHER;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Metal nitride and metal oxynitride extrusions often form on metal silicides. These extrusions can cause short circuits and degrade processing yields. The present invention discloses a method of selectively removing such extrusions. In one embodiment, a novel wet etch comprising an oxidizing agent and a chelating agent selectively removes the extrusions from a wordline in a memory array. In another embodiment, the wet etch includes a base that adjusts the pH of the etch to selectively remove certain extrusions relative to other substances in the wordline. Accordingly, new metal silicide structures can be used to form novel wordlines and other types of integrated circuits.